A fast, preparation-free method to detect iron in silicon.

Autor: Zoth, G., Bergholz, W.
Předmět:
Zdroj: Journal of Applied Physics; 6/1/1990, Vol. 67 Issue 11, p6764, 8p
Abstrakt: Presents information on a study which demonstrated the surface photovoltage (SPV) method to determine the iron (Fe) concentration in boron-doped silicon. Principle of the SPV method; Determination of the Fe concentration by SPV-diffusion length measurements; Relation of the decrease in diffusion length after the dissociation anneal to the Fe concentration of the sample.
Databáze: Complementary Index