Autor: |
Zoth, G., Bergholz, W. |
Předmět: |
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Zdroj: |
Journal of Applied Physics; 6/1/1990, Vol. 67 Issue 11, p6764, 8p |
Abstrakt: |
Presents information on a study which demonstrated the surface photovoltage (SPV) method to determine the iron (Fe) concentration in boron-doped silicon. Principle of the SPV method; Determination of the Fe concentration by SPV-diffusion length measurements; Relation of the decrease in diffusion length after the dissociation anneal to the Fe concentration of the sample. |
Databáze: |
Complementary Index |
Externí odkaz: |
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