Heavily-doped n-type InP and InGaAs grown by metalorganic chemical vapor deposition using tetraethyltin.

Autor: Pinzone, C. J., Gerrard, N. D., Dupuis, R. D., Ha, N. T., Luftman, H. S.
Předmět:
Zdroj: Journal of Applied Physics; 6/1/1990, Vol. 67 Issue 11, p6823, 7p
Abstrakt: Describes results of a study of the use tetraethyltin as a dopant source in the metalorganic chemical vapor deposition growth of indium phosphide and InGaAs and the realization of heavily doped n-type epitaxial layers. Crystal growth and characterization; Results and discussion; Conclusions.
Databáze: Complementary Index