Target magnetic-field effects on deposition rate in rf magnetron sputtering.

Autor:	Furuya, Akinori, Hirono, Shigeru
Předmět:	THIN films SEDIMENTATION & deposition RADIO frequency MAGNETRONS SPUTTERING (Physics)
Zdroj:	Journal of Applied Physics; 7/1/1990, Vol. 68 Issue 1, p304, 7p
Abstrakt:	Presents information on a study which described film deposition rates for radio frequency planar magnetron sputtering when the magnetic field parallel to the target surface is varied. Methods; Results; Discussion.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu