Stress distribution in an aluminum interconnect of very large scale integration.
| Autor: | Niwa, H., Yagi, H., Tsuchikawa, H., Kato, Masaharu |
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| Zdroj: | Journal of Applied Physics; 7/1/1990, Vol. 68 Issue 1, p328, 6p |
| Abstrakt: | Deals with a study which evaluated stresses in the aluminum line integrated circuit using a proposed method in micromechanics. Calculation of stresses in the line; Stresses after complete relaxation; Discussion of relaxation by plastic deformation. |
| Databáze: | Complementary Index |
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