Measurement of ion energy distributions at the powered rf electrode in a variable magnetic field.
| Autor: | Kuypers, A. D., Hopman, H. J. |
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| Předmět: | |
| Zdroj: | Journal of Applied Physics; 2/1/1990, Vol. 67 Issue 3, p1229, 12p, 2 Diagrams, 15 Graphs |
| Abstrakt: | Presents a study that measured the high-resolution energy distributions of ions, accelerated by a sheath at a powered electrode. Approximation of the capacitive sheath; Determination of the shape of the ion energy distribution; Analysis of the mass effect. |
| Databáze: | Complementary Index |
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