Mechanical properties of a-C:H films prepared by plasma decomposition of C2H2.

Autor: Jiang, X., Reichelt, K., Stritzker, B.
Předmět:
Zdroj: Journal of Applied Physics; 8/1/1990, Vol. 68 Issue 3, p1018, 5p, 7 Graphs
Abstrakt: Presents a study which deposited diamondlike hydrogenated amorphous carbon (a-C:H) films by decomposition of C[sub2]H[sub2]. Properties of amorphous carbon films; Details of the experiments on a-C:H films.
Databáze: Complementary Index