Mechanical properties of a-C:H films prepared by plasma decomposition of C2H2.
Autor: | Jiang, X., Reichelt, K., Stritzker, B. |
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Předmět: | |
Zdroj: | Journal of Applied Physics; 8/1/1990, Vol. 68 Issue 3, p1018, 5p, 7 Graphs |
Abstrakt: | Presents a study which deposited diamondlike hydrogenated amorphous carbon (a-C:H) films by decomposition of C[sub2]H[sub2]. Properties of amorphous carbon films; Details of the experiments on a-C:H films. |
Databáze: | Complementary Index |
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