Interfacial reaction studies of Cr, Ni, Ti, and Pt metallization on InP.

Autor: Persson, Leif, El Bouanani, Mohamed, Hult, Mikael, Whitlow, Harry J., Andersson, Margaretha, Bubb, Ian F., Johnston, Peter N., Walker, Scott R., Cohen, David D., Dytlewski, Nick, Zaring, Carina, Östling, Mikael
Předmět:
Zdroj: Journal of Applied Physics; 9/15/1996, Vol. 80 Issue 6, p3346, 9p
Abstrakt: Focuses on a study which examined the interfacial reactions between indium phosphide and thin films of transition metals chromium, nickel, platinum and titanium. Formation of ohmic and rectifying contracts on semiconductor devices; Methodology of the study; Results and discussion.
Databáze: Complementary Index