Effect of stress and composition on the Raman spectra of etch-stop SiGeB layers.

Autor: Pérez-Rodríguez, A., Romano-Rodríguez, A., Cabezas, R., Morante, J. R., Jawhari, T., Hunt, C. E.
Předmět:
Zdroj: Journal of Applied Physics; 11/15/1996, Vol. 80 Issue 10, p5736, 6p, 2 Charts, 6 Graphs
Abstrakt: Presents a study which analyzed the effect of stress and composition on the Raman spectra of etch-stop SiGeB layers. Observations from the Raman spectroscopy method; Effect of stress on the Fano interaction parameters of the first-order silicon-silicon Raman line; Experimental details.
Databáze: Complementary Index