| Autor: |
Ooi, B. S., Hicks, S. E., Bryce, A. C., Wilkinson, C. D. W., Marsh, J. H. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 5/15/1995, Vol. 77 Issue 10, p4961, 6p |
| Abstrakt: |
Deals with the use of a quantum well intermixing probe system to study a damage in gallium arsenide/aluminum gallium arsenide due to exposure to carbon[sub2] fluorine[sub6] plasmas. Dependence of photoluminescence energy shift after rapid thermal processing on radio frequency power; Experimental details and result of the study. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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