Reduction of surface particles on YBa2Cu3O7-∂ thin films through the use of nonstoichiometric sputtering targets and N2O in the sputtering gas.

Autor: Johnson, C. N. L., Helmersson, U., Madsen, L. D., Rudner, S., Wernlund, L.-D.
Předmět:
Zdroj: Journal of Applied Physics; 6/15/1995, Vol. 77 Issue 12, p6388, 6p
Abstrakt: Presents a study which investigated how the surface particle coverage and superconducting properties of direct current-magnetron sputtered thin films change as a function of target stoichiometry. Relationship between the possible barium desorption and the formulation of secondary phases; Results and discussion; Conclusion.
Databáze: Complementary Index