Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition.
| Autor: | Deshpande, Sadanand V., Gulari, Erdogan, Brown, Steven W., Rand, Stephen C. |
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| Zdroj: | Journal of Applied Physics; 6/15/1995, Vol. 77 Issue 12, p6534, 8p, 8 Graphs |
| Abstrakt: | Presents a study which examined the optical properties of silicon nitride films deposited by hot filament chemical vapor deposition. Experimental techniques; Results; Discussion. |
| Databáze: | Complementary Index |
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