Analysis of deposition stress during thin-film growth on a relaxing substrate.

Autor:	Rosenberg, Sara E., Wong, Peter Y., Miaoulis, Ioannis N.
Předmět:	DIAMOND thin films THIN films STRAINS & stresses (Mechanics)
Zdroj:	Journal of Applied Physics; 6/15/1995, Vol. 77 Issue 12, p6273, 5p, 1 Diagram, 4 Graphs
Abstrakt:	Presents a study which analyzed deposition stress during diamond thin film growth on a relaxing substrate. Theoretical background on diamond thin film growth and deposition; Numerical model; Results.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu