Design of ion energy distributions by a broad beam ion source.
| Autor: | Zeuner, Michael, Meichsner, Jürgen, Neumann, Horst, Scholze, Frank, Bigl, Frieder |
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| Zdroj: | Journal of Applied Physics; 7/15/1996, Vol. 80 Issue 2, p611, 12p, 2 Diagrams, 16 Graphs |
| Abstrakt: | Deals with a study which characterized the performance of a built-in hot filament broad beam ion source by mass spectrometry. Experimental apparatus; Results and diagnosis; Conclusions. |
| Databáze: | Complementary Index |
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