Observations of electromigration induced void nucleation and growth in polycrystalline and near-bamboo passivated Al lines.

Autor: Marieb, T., Flinn, P., Bravman, J. C., Gardner, D., Madden, M.
Předmět:
Zdroj: Journal of Applied Physics; 7/15/1995, Vol. 78 Issue 2, p1026, 7p, 9 Black and White Photographs
Abstrakt: Focuses on a study which detailed an observation on electromigration voiding in passivated pure aluminum lines in situ using high voltage scanning electron microscopy. Types of lines investigated; Requirement of microstructural sites; Effect of the microstructure of the lines on the void motion.
Databáze: Complementary Index