Chemical-beam-epitaxy growth of indium-containing III–V compounds using triisopropylindium.

Autor: Freer, R. W., Lane, P. A., Martin, T., Whitehouse, C. R., Whitaker, T. J., Williams, G. M., Cullis, A. G., Calcott, P. D. J., Nash, K. D., Buchannan, H., Jones, A. C., Rushworth, S.
Předmět:
Zdroj: Journal of Applied Physics; 1/15/1996, Vol. 79 Issue 2, p917, 6p, 6 Graphs
Abstrakt: Presents a study that investigated triisopropyl indium (TIPIn) as an alternative to trimethyl indium for use in chemical-beam epitaxy. Characterization of TIPIn precursors; Details on growth modulated-beam mass spectrometry experiments; Assessment of InGaAs growth and material properties.
Databáze: Complementary Index