Improvement of selectivity during diamond growth utilizing a new process.
| Autor: | Chen, Chia-Fu, Chen, Sheng-Hsiung, Hong, Tsao-Ming, Tsai, Ming-Hsing |
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| Zdroj: | Journal of Applied Physics; 1/15/1995, Vol. 77 Issue 2, p940, 3p |
| Abstrakt: | Presents a study that investigated the improvement of selectivity during diamond growth. Information on how to achieve diamond patterning; Shortages experienced by using ion implanting method; Description of the procedure for selective diamond growth. |
| Databáze: | Complementary Index |
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