| Autor: |
Smeys, Peter I. L., Griffin, Peter B., Saraswat, Krishna C. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 8/15/1995, Vol. 78 Issue 4, p2837, 6p |
| Abstrakt: |
Presents a study that focused on the increasing cost and complexity of semiconductor process development which led to the widespread use of multidimensional semiconductor process simulators. Use of Raman spectroscopy; Background on integrated circuit technologies; Importance of silicon nitride films tp the semiconductor industry. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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