Mass density and hydrogen content of diamondlike carbon as related to the preparation by plasma-enhanced chemical vapor deposition.

Autor: Vigild, M. E., Findeisen, E., Feidenhans’l, R., Barholm-Hansen, C., Bentzon, M. D., Bindslev Hansen, J.
Předmět:
Zdroj: Journal of Applied Physics; 4/15/1996, Vol. 79 Issue 8, p4050, 7p, 3 Diagrams, 3 Charts, 4 Graphs
Abstrakt: Provides information on a study which used combined neutron and x-ray reflectometry to determine the mass density and hydrogen content for thin diamondlike hydrocarbon films on polished silicon substrates. Methods; Results and discussion; Conclusion.
Databáze: Complementary Index