In situ observation of the strain in GaP on Si during cooling step after growth by Raman spectroscopy.

Autor: Sugiura, Masayuki, Kishi, Masato, Katoda, Takashi
Předmět:
Zdroj: Journal of Applied Physics; 4/15/1995, Vol. 77 Issue 8, p4009, 4p, 3 Diagrams, 2 Charts, 1 Graph
Abstrakt: Provides information on a study that presented an in situ Raman measurement system for the characterization of the strain in the heterostructure and results for the gallium phosphide silicon structure at the cooling step from the growth temperature to room temperature. Experimental procedure; Results and discussion on the study; Conclusions.
Databáze: Complementary Index