Depth inhomogeneity of porous silicon layers.
Autor: | Thönissen, M., Billat, S., Krüger, M., Lüth, H., Berger, M. G., Frotscher, U., Rossow, U. |
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Zdroj: | Journal of Applied Physics; 9/1/1996, Vol. 80 Issue 5, p2990, 4p, 5 Graphs |
Abstrakt: | Discusses a study which investigated the depth inhomogeneity of porous silicon layers. Theoretical background; Methods used; Findings. |
Databáze: | Complementary Index |
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