Preparation of self-aligned in-line tunnel junctions for applications in single-charge electronics.

Autor: Götz, M., Blüthner, K., Krech, W., Nowack, A., Fuchs, H.-J., Kley, E.-B., Thieme, P., Wagner, Th., Eska, G., Hecker, K., Hegger, H.
Předmět:
Zdroj: Journal of Applied Physics; 11/1/1995, Vol. 78 Issue 9, p5499, 4p, 1 Black and White Photograph, 1 Diagram, 2 Graphs
Abstrakt: Presents information on a study which applied the self-aligned technique to the preparation of ultrasmall low-capacitance metallic tunnel junctions. Steps of the self-aligned in-line technique; Sample preparation; Experimental results.
Databáze: Complementary Index