Growth of epitaxial AlN(0001) on Si(111) by reactive magnetron sputter deposition.
| Autor: | Ivanov, I., Hultman, L., Järrendahl, K., Mårtensson, P., Sundgren, J.-E., Hjörvarsson, B., Greene, J. E. |
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| Zdroj: | Journal of Applied Physics; 11/1/1995, Vol. 78 Issue 9, p5721, 6p, 4 Diagrams, 1 Chart, 5 Graphs |
| Abstrakt: | Presents a study that examined the growth of epitaxial aluminum nitride(0001) on silicon(111) by reactive magnetron sputter deposition. Experimental procedure; Results and discussion; Conclusions. |
| Databáze: | Complementary Index |
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