Film quality in relation to deposition conditions of a-SI:H films deposited by the ‘‘hot wire’’ method using highly diluted silane.
| Autor: | Molenbroek, Edith C., Mahan, A. H., Johnson, E. J., Gallagher, A. C. |
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| Zdroj: | Journal of Applied Physics; 5/1/1996, Vol. 79 Issue 9, p7278, 15p, 1 Diagram, 7 Charts, 13 Graphs |
| Abstrakt: | Provides information on a study that examined how the quality of hot wire films made with highly diluted silane depends on the deposition conditions. Methodology of the study; Results and discussion on the study. |
| Databáze: | Complementary Index |
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