| Autor: |
Rego, C. A., Tsang, R. S., May, P. W., Ashfold, M. N. R., Rosser, K. N. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 5/1/1996, Vol. 79 Issue 9, p7264, 10p, 1 Black and White Photograph, 2 Diagrams, 2 Charts, 6 Graphs |
| Abstrakt: |
Presents information on a study that constructed a molecular beam mass spectrometer designed specifically to sample gases from a diamond chemical vapor deposition (CVD) process chamber thereby enabling characterization of the gas-phase CVD environment. Experimental procedure; Results and discussion on the study. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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