| Autor: |
Herzinger, C. M., Yao, H., Snyder, P. G., Celii, F. G., Kao, Y.-C., Johs, B., Woollam, J. A. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 5/1/1995, Vol. 77 Issue 9, p4677, 11p, 4 Charts, 13 Graphs |
| Abstrakt: |
Discusses a study on the determination of aluminum arsenic (AlAs) optical constants by variable angle spectroscopic ellipsometry and a multisample analysis. Tabulated and parametric optical constants; Correlation of cap optical constants and thicknesses; Examination of the role of fitting the cap optical constants; Application to very thin AlAs layers. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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