Studies of thin strained InAs, AlAs, and AlSb layers by spectroscopic ellipsometry.

Autor: Herzinger, C. M., Snyder, P. G., Celii, F. G., Kao, Y.-C., Chow, D., Johs, B., Woollam, J. A.
Předmět:
Zdroj: Journal of Applied Physics; 3/1/1996, Vol. 79 Issue 5, p2663, 12p, 7 Charts, 10 Graphs
Abstrakt: Provides information on a study that investigated the optical constants for thin layers of strained InAs, AlAs and AlSb layers by spectroscopic ellipsometry and multi-sample analysis. Experimental procedures; Results and discussion on the study; Conclusions.
Databáze: Complementary Index