Optical properties of boron carbide (B5C) thin films fabricated by plasma-enhanced chemical-vapor deposition.

Autor: Ahmad, Ahmad A., Ianno, N. J., Snyder, P. G., Welipitiya, D., Byun, D., Dowben, P. A.
Předmět:
Zdroj: Journal of Applied Physics; 6/1/1996, Vol. 79 Issue 11, p8643, 5p, 1 Chart, 6 Graphs
Abstrakt: Provides information on a study that determined the optical constants of plasma-enhanced chemical-vapor deposition boron carbide thin films by spectroscopic ellipsometry and spectrophotometry. Experimental procedure; Results and discussion on the study.
Databáze: Complementary Index