Residual stresses in amorphous alumina films synthesized by ion beam assisted deposition.

Autor:	Parfitt, L., Goldiner, M., Jones, J. W., Was, G. S.
Předmět:	RESIDUAL stresses ALUMINUM oxide ION bombardment CHEMICAL vapor deposition
Zdroj:	Journal of Applied Physics; 4/1/1995, Vol. 77 Issue 7, p3029, 8p, 1 Diagram, 10 Graphs
Abstrakt:	Focuses on a study which determined the origin of residual stresses in amorphous Al[sub2]O[sub3] films formed by ion beam assisted deposition. Background on models about the origin of residual stress; Experimental procedure; Results; Discussion.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu