Arsenic segregation to silicon/silicon oxide interfaces.

Autor: Wong, C. Y., Grovenor, C. R. M., Batson, P. E., Isaac, R. D.
Předmět:
Zdroj: Journal of Applied Physics; 8/1/1985, Vol. 58 Issue 3, p1259, 4p, 2 Black and White Photographs
Abstrakt: Focuses on a study that examined arsenic segregation at polycrystalline silicon/silicon and polycrystalline silicon/silicon oxide interfaces by transmission electron microscopy and scanning transmission electron microscopy. Segregation occurring at the interfaces; Proposed model based on arsenic segregation to structural units containing dangling bonds and consequent bond saturation; Role of the dangling bonds in the electrical properties of the interfaces.
Databáze: Complementary Index