Numerical simulations of Czochralski silicon growth.
| Autor: | Chan, Y. T., Gibeling, H. J., Grubin, H. L. |
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| Zdroj: | Journal of Applied Physics; 8/1/1988, Vol. 64 Issue 3, p1425, 15p, 1 Diagram, 3 Charts, 14 Graphs |
| Abstrakt: | Presents a study which developed and applied a numerical technique to the Czochralski process, a method of growing silicon crystals. Fundamentals of Czochralski growth; Numerical procedure; Conclusions. |
| Databáze: | Complementary Index |
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