Surface polygonization on GaAs wafers.
| Autor: | Gray, M. L., Abemathy, C. R., Caruso, R., Jordan, A. S., Parsey, J. M. |
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| Zdroj: | Journal of Applied Physics; 8/1/1988, Vol. 64 Issue 3, p1468, 4p, 5 Black and White Photographs |
| Abstrakt: | Presents a study which examined the polygonized surface structure produced by furnace annealing gallium arsenide wafers by optical and scanning electron microscopy. Experimental details; Results; Discussion. |
| Databáze: | Complementary Index |
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