Ion beam rehydrogenation and post-hydrogenation of a-Si:H.
| Autor: | Tsuo, Y. S., Deng, X. J., Smith, E. B., Xu, Y., Deb, S. K. |
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| Zdroj: | Journal of Applied Physics; 8/1/1988, Vol. 64 Issue 3, p1604, 4p, 1 Chart, 2 Graphs |
| Abstrakt: | Presents a study which examined the rehydrogenation and post-hydrogenation of hydrogenated amorphous silicon using a Kaufman ion beam source. Experimental details; Information on the Kaufman ion beam source; Conclusion. |
| Databáze: | Complementary Index |
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