The formation and annealing of dislocation damage from high-dose self-ion implantation of aluminum.

Autor: Vardiman, R. G.
Předmět:
Zdroj: Journal of Applied Physics; 6/1/1992, Vol. 71 Issue 11, p5386, 5p, 2 Black and White Photographs, 4 Graphs
Abstrakt: Presents a study which examined the formation and annealing of dislocation damage from high-dose self-ion implantation of aluminum. Models of dislocation network growth; Experimental methods; Results.
Databáze: Complementary Index