Dissolution pits and Si epitaxial regrowth in the Al/(111)Si system.

Autor: Fujimura, Norifumi, Kurosaki, Hideki, Ito, Taichiro, Nakayama, Yutaka
Předmět:
Zdroj: Journal of Applied Physics; 11/1/1988, Vol. 64 Issue 9, p4499, 4p, 4 Black and White Photographs, 1 Diagram, 1 Graph
Abstrakt: Presents a study that examined the reaction between aluminum thin films and silicon substrate using transmission and scanning electron microscopy. Methodology; Relation between the length of sides and depth of the triangular pits of the samples; Features of the reaction at the interface.
Databáze: Complementary Index