Quantitative Auger sputter depth profiling of very thin nitrided oxide.
| Autor: | Barla, K., Nicolas, D., Pantel, R., Vuillermoz, B., Straboni, A., Caratini, Y. |
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| Zdroj: | Journal of Applied Physics; 10/1/1990, Vol. 68 Issue 7, p3635, 8p |
| Abstrakt: | Investigates plasma nitridation of thin oxides. Discussion on the nitridation of thermally grown oxides; Details on the experiment; Overview of the Auger depth profile deconvolution. |
| Databáze: | Complementary Index |
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