Emission distribution, brightness, and mechanical stability of the LaB6 triode electron gun.

Autor: Gesley, Mark, Hohn, Fritz
Předmět:
Zdroj: Journal of Applied Physics; 10/1/1988, Vol. 64 Issue 7, p3380, 13p, 6 Black and White Photographs, 8 Diagrams, 7 Graphs
Abstrakt: Focuses on a study which detailed experiments that have characterized the operation of a LaB[sub6] triode gun in a standard three-lens column of the type used for Gaussian electron-beam lithography and scanning electron microscopy. Function of the triode gun; Condition in which virtual objects are imaged; Use of the temperature-dependent brightness of the cathode.
Databáze: Complementary Index