| Autor: |
Tanahashi, Kiwamu, Takata, H. J., Otuki, A., Murakami, Masanori |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 11/1/1992, Vol. 72 Issue 9, p4183, 8p |
| Abstrakt: |
Presents information on a study which developed non-gold NiGe Ohmic contacts by a lift-off and annealing technique that was extensively used to fabricate the conventional AuGeNi contacts. Experimental procedures; Ohmic contact formation; Isochronal annealing for contact formation; Correlation between electrical properties and microstructures. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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