Temperature measurements of polyimide during KrF excimer laser ablation.

Autor: Brunco, D. P., Thompson, Michael O., Otis, C. E., Goodwin, P. M.
Předmět:
Zdroj: Journal of Applied Physics; 11/1/1992, Vol. 72 Issue 9, p4344, 7p
Abstrakt: Presents information on a study which monitored the temperature at the interface between a thin polyimide film and a quartz substrate as a function of time during laser-induced heating and ablation using thin film NiSi thermistors. Materials which have shown clean ablation under excimer laser irradiation; Photochemical process for most mathematical models of ablation; Fabrication of thermistors; Thermistor temperature profiles.
Databáze: Complementary Index