Self-aligned Si-Zn diffusion into GaAs and AlGaAs.
| Autor: | Zou, W. X., Corzine, S., Vawter, G. A., Merz, J. L., Coldren, L. A., Hu, E. L. |
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| Zdroj: | Journal of Applied Physics; 8/15/1988, Vol. 64 Issue 4, p1855, 4p, 2 Diagrams, 3 Graphs |
| Abstrakt: | Presents a study that developed a practical technology for self-aligned silicon-zinc diffusion into gallium arsenide and aluminum gallium arsenide. Details of the experiment; Results and discussion; Conclusions. |
| Databáze: | Complementary Index |
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