Deposition of a Si monolayer on sapphire using an ArF excimer laser for Si epitaxial growth.

Autor: Ishida, M., Tanaka, H., Sawada, K., Namiki, A., Nakamura, T., Ohtake, N.
Předmět:
Zdroj: Journal of Applied Physics; 8/15/1988, Vol. 64 Issue 4, p2087, 5p, 1 Chart, 1 Graph
Abstrakt: Presents information on a study which investigated silicon (Si) monolayer deposition on sapphire substrates by in situ x-ray photoelectron spectroscopy (XPS). Information on the XPS analysis of Si monolayer deposited on sapphire; Growth mechanisms for noninterdiffusing systems; Description of the epitaxial growth of Si on sapphire surface predeposited by photolysis of Si[sub2]H[sub6].
Databáze: Complementary Index