| Autor: |
Russell, S. W., Li, Jian, Mayer, J. W. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 11/1/1991, Vol. 70 Issue 9, p5153, 3p, 1 Black and White Photograph, 4 Graphs |
| Abstrakt: |
Presents a study on the in situ observation of both the silicidation reaction, forming Cu[sub3]Si and the subsequent crystallization of the remaining amorphous silicon (Si) in the silicide matrix. Discussion on the crystallization of amorphous silicon; Method used in determining the average thickness and composition of the samples; Record of the growth process of dendrite Si. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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