| Autor: |
Pivac, B., Borghesi, A., Sassella, A., Ottolini, L., Kalejs, J. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 9/15/1991, Vol. 70 Issue 6, p2963, 5p, 4 Graphs |
| Abstrakt: |
Reports on the interaction of ambient gas and meniscus surface during growth of edge-defined film-fed growth (EFG) polycrystalline silicon samples. Impact of carbon monoxide and carbon dioxide on carbon content of the nonagons; Significance of the presence of oxygen in edge-defined film-fed grown polycrystalline silicon ribbon; Depth profiles of oxygen and carbon for EFG. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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