Backscattering analysis of AuGe-Ni ohmic contacts of n-GaAs.

Autor:	Cohen, D. D., Kalkur, T. S., Sutherland, G. J., Nassibian, A. G.
Předmět:	ALLOYS OHMIC contacts GALLIUM arsenide FURNACES
Zdroj:	Journal of Applied Physics; 11/1/1986, Vol. 60 Issue 9, p3100, 5p, 1 Diagram, 7 Graphs
Abstrakt:	Deals with a study which utilized AuGe-Ni for the fabrication of ohmic contacts to n-gallium arsenide. Behavior of evaporated AuGe-Ni alloy; Redistribution of contituents in the ohmic contact formation; Details on furnace alloying.
Databáze:	Complementary Index
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