| Autor: |
Hamaguchi, S., Dalvie, M., Farouki, R. T., Sethuraman, S. |
| Předmět: |
|
| Zdroj: |
Journal of Applied Physics; 10/15/1993, Vol. 74 Issue 8, p5172, 13p, 3 Diagrams, 10 Graphs |
| Abstrakt: |
Provides information on an algorithm that determines the evolution of a surface eroding under reactive-ion etching. Use of the Hamilton-Jacobi equation; Calculation of slope discontinuities without artificial diffusion; Description of a moving surface by a partial differential equation. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
