| Autor: |
Loopstra, O. B., Sloof, W. G., de Keijser, Th. H., Mittemeijer, E. J., Radelaar, S., Kuiper, A. E. T., Wolters, R. A. M. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 5/15/1988, Vol. 63 Issue 10, p4960, 10p, 10 Graphs |
| Abstrakt: |
Focuses on a study with which analyzed the annealing-induced variations in compositions, microstructure, resistivity and internal stresses of amorphous molybdenum/silicon. Specimen preparation; Composition and architecture of the molybdenum silicate layers; Crystalline phase formation. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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