High-pressure thermal oxidation of InP in steam.
| Autor: | Gann, R. G., Geib, K. M., Wilmsen, C. W., Costello, J., Hrychowain, G., Zeto, R. J. |
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| Zdroj: | Journal of Applied Physics; 1/15/1988, Vol. 63 Issue 2, p506, 4p |
| Abstrakt: | Studies the high-pressure thermal oxidation of indium phosphide (InP) in steam. Composition of thermally grown oxides on InP; Methodology of the study; Discussion on the results of the experiment. |
| Databáze: | Complementary Index |
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