Close spatial correlation and chemical effects in annealing of paramagnetic oxygen vacancies (E’1 centers) in ion-implanted amorphous SiO2.

Autor: Golanski, A., Pfister, J. C., Nicolle, T.
Předmět:
Zdroj: Journal of Applied Physics; 2/15/1986, Vol. 59 Issue 4, p1096, 7p, 2 Charts, 4 Graphs
Abstrakt: Presents information on a study which examined the isochronal and isothermal irreversible annealing of E[sup']sub1] defects induced in amorphous silicon dioxide by implantation of helium[sup+], nitrogen[sup+], oxygen[sup+] and bismuth[sup+] ions using electron paramagnetic resonance. Experimental details; Results and discussion; Conclusions.
Databáze: Complementary Index