Optical and electrical characterizations of laser–chemical-vapor-deposited aluminum oxynitride films.

Autor:	Demiryont, H., Thompson, L. R., Collins, G. J.
Předmět:	ALUMINUM oxide ELECTRIC properties of thin films METAL insulator semiconductors
Zdroj:	Journal of Applied Physics; 5/1/1986, Vol. 59 Issue 9, p3235, 6p, 2 Diagrams, 2 Charts, 6 Graphs
Abstrakt:	Investigates the composition-dependent optical and electrical properties of thin film aluminum oxynitride. Techniques in depositing aluminum oxynitride films; Current-voltage characteristics of metal-insulator semiconductor structures; Optimal properties of the films.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu