Effect of annealing on carbon concentration in edge-defined film-fed grown polycrystalline silicon.

Autor:	Pivac, B., Amiotti, M., Borghesi, A., Sassella, A., Kalejs, J.
Předmět:	ANNEALING of metals CARBON POLYCRYSTALS SILICON
Zdroj:	Journal of Applied Physics; 4/15/1992, Vol. 71 Issue 8, p3785, 3p, 2 Graphs
Abstrakt:	Deals with a study which investigated the effect of annealing on carbon concentration in edge-defined film-fed grown polycrystalline silicon. Background to the study; Experimental procedures; Results and discussion.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu