The effect of the flow of silane on the properties of a-Si:H deposited by concentric-electrode radio frequency glow-discharge.
| Autor: | Conde, J. P., Chan, K. K., Blum, J. M., Arienzo, M. |
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| Zdroj: | Journal of Applied Physics; 4/15/1992, Vol. 71 Issue 8, p3990, 7p, 8 Graphs |
| Abstrakt: | Deals with a study which described a novel concept for preparing highly photosensitive hydrogenated amorphous silicon-based semiconductors. Experimental procedures; Results; Discussion; Conclusion. |
| Databáze: | Complementary Index |
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